Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications

Davood Shahrjerdi, Tank Akyol, Sanjay K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationElectronic Material Conference, 2007
StatePublished - 2007

Cite this

Shahrjerdi, D., Akyol, T., & Banerjee, S. K. (2007). Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications. In Electronic Material Conference, 2007

Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications. / Shahrjerdi, Davood; Akyol, Tank; Banerjee, Sanjay K.

Electronic Material Conference, 2007. 2007.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shahrjerdi, D, Akyol, T & Banerjee, SK 2007, Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications. in Electronic Material Conference, 2007.
Shahrjerdi D, Akyol T, Banerjee SK. Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications. In Electronic Material Conference, 2007. 2007
Shahrjerdi, Davood ; Akyol, Tank ; Banerjee, Sanjay K. / Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications. Electronic Material Conference, 2007. 2007.
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title = "Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications",
author = "Davood Shahrjerdi and Tank Akyol and Banerjee, {Sanjay K.}",
year = "2007",
language = "English (US)",
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T1 - Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications

AU - Shahrjerdi, Davood

AU - Akyol, Tank

AU - Banerjee, Sanjay K.

PY - 2007

Y1 - 2007

M3 - Conference contribution

BT - Electronic Material Conference, 2007

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