Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications

Davood Shahrjerdi, Tank Akyol, Sanjay K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationElectronic Material Conference, 2007
StatePublished - 2007

Cite this

Shahrjerdi, D., Akyol, T., & Banerjee, S. K. (2007). Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications. In Electronic Material Conference, 2007