Application of set membership identification for fault detection of MEMS

Vasso Reppa, Antonios Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.

Original languageEnglish (US)
Title of host publicationProceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Pages643-648
Number of pages6
Volume2006
DOIs
Publication statusPublished - Dec 27 2006
Event2006 IEEE International Conference on Robotics and Automation, ICRA 2006 - Orlando, FL, United States
Duration: May 15 2006May 19 2006

Other

Other2006 IEEE International Conference on Robotics and Automation, ICRA 2006
CountryUnited States
CityOrlando, FL
Period5/15/065/19/06

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Keywords

  • Fault detection
  • MEMS
  • Set membership identification

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Artificial Intelligence
  • Electrical and Electronic Engineering

Cite this

Reppa, V., & Tzes, A. (2006). Application of set membership identification for fault detection of MEMS. In Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006 (Vol. 2006, pp. 643-648). [1641783] https://doi.org/10.1109/ROBOT.2006.1641783