Application of PET plastics in micro-sensor fabrication

B. S. Makki, M. Kargar, S. Mohajerzadeh, T. Maleki, Davood Shahrjerdi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Polycrystalline germanium-based thermopiles are fabricated at reduced temperatures on plastic substrate. The Amorphous Ge film, deposited using electron beam evaporation, is post-treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120 to 175°C. The physical characteristics of Ge films have been investigated using XRD and SEM tools confirming the crystallinity of the annealed films. A Seebeck value of 100 μV/°C is extracted for the Ge-Al junctions. A novel ultraviolet assisted micro-machining is presented in which anisotropic etching of PET plastic substrate is achieved. The etching of plastic is performed in a DMF solution and in presence of ultraviolet light illumination with a typical intensity of 15 mW/hr measured at a wavelength of 360 nm. This technique has been applied to realize square membrane, craters, micro-gears and micro-molds.

Original languageEnglish (US)
Title of host publicationProceedings of the 15th International Conference on Microelectronics, ICM 2003
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages357-360
Number of pages4
Volume2003-January
ISBN (Print)9770520101
DOIs
StatePublished - 2003
Event15th International Conference on Microelectronics, ICM 2003 - Cairo, Egypt
Duration: Dec 9 2003Dec 11 2003

Other

Other15th International Conference on Microelectronics, ICM 2003
CountryEgypt
CityCairo
Period12/9/0312/11/03

Fingerprint

Plastics
Fabrication
Sensors
Thermopiles
Anisotropic etching
Molds
Substrates
Germanium
Gears
Electron beams
Etching
Machining
Evaporation
Lighting
Annealing
Membranes
Wavelength
Temperature
Scanning electron microscopy
Ultraviolet Rays

Keywords

  • Amorphous materials
  • Annealing
  • Electron beams
  • Etching
  • Fabrication
  • Plastics
  • Positron emission tomography
  • Substrates
  • Temperature distribution
  • X-ray scattering

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Makki, B. S., Kargar, M., Mohajerzadeh, S., Maleki, T., & Shahrjerdi, D. (2003). Application of PET plastics in micro-sensor fabrication. In Proceedings of the 15th International Conference on Microelectronics, ICM 2003 (Vol. 2003-January, pp. 357-360). [1287833] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICM.2003.237932

Application of PET plastics in micro-sensor fabrication. / Makki, B. S.; Kargar, M.; Mohajerzadeh, S.; Maleki, T.; Shahrjerdi, Davood.

Proceedings of the 15th International Conference on Microelectronics, ICM 2003. Vol. 2003-January Institute of Electrical and Electronics Engineers Inc., 2003. p. 357-360 1287833.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Makki, BS, Kargar, M, Mohajerzadeh, S, Maleki, T & Shahrjerdi, D 2003, Application of PET plastics in micro-sensor fabrication. in Proceedings of the 15th International Conference on Microelectronics, ICM 2003. vol. 2003-January, 1287833, Institute of Electrical and Electronics Engineers Inc., pp. 357-360, 15th International Conference on Microelectronics, ICM 2003, Cairo, Egypt, 12/9/03. https://doi.org/10.1109/ICM.2003.237932
Makki BS, Kargar M, Mohajerzadeh S, Maleki T, Shahrjerdi D. Application of PET plastics in micro-sensor fabrication. In Proceedings of the 15th International Conference on Microelectronics, ICM 2003. Vol. 2003-January. Institute of Electrical and Electronics Engineers Inc. 2003. p. 357-360. 1287833 https://doi.org/10.1109/ICM.2003.237932
Makki, B. S. ; Kargar, M. ; Mohajerzadeh, S. ; Maleki, T. ; Shahrjerdi, Davood. / Application of PET plastics in micro-sensor fabrication. Proceedings of the 15th International Conference on Microelectronics, ICM 2003. Vol. 2003-January Institute of Electrical and Electronics Engineers Inc., 2003. pp. 357-360
@inproceedings{fbb20bb5394041c9888b5c836565df88,
title = "Application of PET plastics in micro-sensor fabrication",
abstract = "Polycrystalline germanium-based thermopiles are fabricated at reduced temperatures on plastic substrate. The Amorphous Ge film, deposited using electron beam evaporation, is post-treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120 to 175°C. The physical characteristics of Ge films have been investigated using XRD and SEM tools confirming the crystallinity of the annealed films. A Seebeck value of 100 μV/°C is extracted for the Ge-Al junctions. A novel ultraviolet assisted micro-machining is presented in which anisotropic etching of PET plastic substrate is achieved. The etching of plastic is performed in a DMF solution and in presence of ultraviolet light illumination with a typical intensity of 15 mW/hr measured at a wavelength of 360 nm. This technique has been applied to realize square membrane, craters, micro-gears and micro-molds.",
keywords = "Amorphous materials, Annealing, Electron beams, Etching, Fabrication, Plastics, Positron emission tomography, Substrates, Temperature distribution, X-ray scattering",
author = "Makki, {B. S.} and M. Kargar and S. Mohajerzadeh and T. Maleki and Davood Shahrjerdi",
year = "2003",
doi = "10.1109/ICM.2003.237932",
language = "English (US)",
isbn = "9770520101",
volume = "2003-January",
pages = "357--360",
booktitle = "Proceedings of the 15th International Conference on Microelectronics, ICM 2003",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - GEN

T1 - Application of PET plastics in micro-sensor fabrication

AU - Makki, B. S.

AU - Kargar, M.

AU - Mohajerzadeh, S.

AU - Maleki, T.

AU - Shahrjerdi, Davood

PY - 2003

Y1 - 2003

N2 - Polycrystalline germanium-based thermopiles are fabricated at reduced temperatures on plastic substrate. The Amorphous Ge film, deposited using electron beam evaporation, is post-treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120 to 175°C. The physical characteristics of Ge films have been investigated using XRD and SEM tools confirming the crystallinity of the annealed films. A Seebeck value of 100 μV/°C is extracted for the Ge-Al junctions. A novel ultraviolet assisted micro-machining is presented in which anisotropic etching of PET plastic substrate is achieved. The etching of plastic is performed in a DMF solution and in presence of ultraviolet light illumination with a typical intensity of 15 mW/hr measured at a wavelength of 360 nm. This technique has been applied to realize square membrane, craters, micro-gears and micro-molds.

AB - Polycrystalline germanium-based thermopiles are fabricated at reduced temperatures on plastic substrate. The Amorphous Ge film, deposited using electron beam evaporation, is post-treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120 to 175°C. The physical characteristics of Ge films have been investigated using XRD and SEM tools confirming the crystallinity of the annealed films. A Seebeck value of 100 μV/°C is extracted for the Ge-Al junctions. A novel ultraviolet assisted micro-machining is presented in which anisotropic etching of PET plastic substrate is achieved. The etching of plastic is performed in a DMF solution and in presence of ultraviolet light illumination with a typical intensity of 15 mW/hr measured at a wavelength of 360 nm. This technique has been applied to realize square membrane, craters, micro-gears and micro-molds.

KW - Amorphous materials

KW - Annealing

KW - Electron beams

KW - Etching

KW - Fabrication

KW - Plastics

KW - Positron emission tomography

KW - Substrates

KW - Temperature distribution

KW - X-ray scattering

UR - http://www.scopus.com/inward/record.url?scp=77957841118&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77957841118&partnerID=8YFLogxK

U2 - 10.1109/ICM.2003.237932

DO - 10.1109/ICM.2003.237932

M3 - Conference contribution

AN - SCOPUS:77957841118

SN - 9770520101

VL - 2003-January

SP - 357

EP - 360

BT - Proceedings of the 15th International Conference on Microelectronics, ICM 2003

PB - Institute of Electrical and Electronics Engineers Inc.

ER -