An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors

Tae Won Kim, Saurabh J. Ullal, Vahid Vahedi, Eray Aydil

Research output: Contribution to journalArticle

Original languageEnglish (US)
Number of pages1
JournalReview of Scientific Instruments
Volume73
Issue number10
DOIs
StatePublished - Oct 1 2002

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reactors
wafers
Fluxes
Plasmas
probes
Ions
ions

ASJC Scopus subject areas

  • Instrumentation

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An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors. / Kim, Tae Won; Ullal, Saurabh J.; Vahedi, Vahid; Aydil, Eray.

In: Review of Scientific Instruments, Vol. 73, No. 10, 01.10.2002.

Research output: Contribution to journalArticle

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