An integrated gain scheduled control design for an electrostatic micro-actuator with aerodynamic effects

Marialena Vagia, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article an integrated approach regarding the modeling and control design aspects of an electrostatic microactuator (EmA) with aerodynamic effects is presented. The modeling analysis of the squeezed film damping effect is investigated in the case of an EmA composed by a set of two plates. The bottom plate is clamped to the ground, while the moving plate is driven by an electrically induced force which is opposed by the force exerted by a spring element. The damping coefficient that is caused because of the thin film of air, is approximated by a frequency independent nonlinear static term. Under this assumption, the nonlinear model of the EmA is linearized at various operating points, and the feedforward compensator provides the nominal voltage. Subsequently a gain scheduled H-controller is used to tune the controller-parameters depending on the EmA's operating conditions. The controller is designed at various operating points based on the distance between its plates. Simulation results investigate the efficacy of the suggested modeling and control techniques.

Original languageEnglish (US)
Title of host publicationProceedings of the 2010 American Control Conference, ACC 2010
PublisherIEEE Computer Society
Pages4175-4180
Number of pages6
ISBN (Print)9781424474264
DOIs
StatePublished - Jan 1 2010

Publication series

NameProceedings of the 2010 American Control Conference, ACC 2010

    Fingerprint

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Vagia, M., & Tzes, A. (2010). An integrated gain scheduled control design for an electrostatic micro-actuator with aerodynamic effects. In Proceedings of the 2010 American Control Conference, ACC 2010 (pp. 4175-4180). [5530598] (Proceedings of the 2010 American Control Conference, ACC 2010). IEEE Computer Society. https://doi.org/10.1109/acc.2010.5530598