Advanced control system design for high speed ultra accurate manufacturing systems

F. Khorrami, H. Melkote, J. Ish-Shalom

Research output: Contribution to journalConference article

Abstract

In this paper, we describe the application of a robust adaptive control design to an ultra accurate (sub-micron) linear and planar step motor known as the Sawyer motor. Simulation results presented show promising improvement in performance with the advocated controller.

Original languageEnglish (US)
Pages (from-to)164-165
Number of pages2
JournalProceedings of the American Control Conference
Volume1
StatePublished - Jan 1 1997
EventProceedings of the 1997 American Control Conference. Part 3 (of 6) - Albuquerque, NM, USA
Duration: Jun 4 1997Jun 6 1997

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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