Abstract
The absolute partial and total electron impact ionization cross sections of SiF4, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1170-1177 |
| Number of pages | 8 |
| Journal | Journal of Chemical Physics |
| Volume | 114 |
| Issue number | 3 |
| DOIs | |
| State | Published - Jan 2001 |
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ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
Cite this
Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF4). / Basner, R.; Schmidt, M.; Denisov, E.; Becker, K.; Deutsch, H.
In: Journal of Chemical Physics, Vol. 114, No. 3, 01.2001, p. 1170-1177.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF4)
AU - Basner, R.
AU - Schmidt, M.
AU - Denisov, E.
AU - Becker, K.
AU - Deutsch, H.
PY - 2001/1
Y1 - 2001/1
N2 - The absolute partial and total electron impact ionization cross sections of SiF4, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.
AB - The absolute partial and total electron impact ionization cross sections of SiF4, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.
UR - http://www.scopus.com/inward/record.url?scp=0035124653&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035124653&partnerID=8YFLogxK
U2 - 10.1063/1.1333018
DO - 10.1063/1.1333018
M3 - Article
VL - 114
SP - 1170
EP - 1177
JO - Journal of Chemical Physics
JF - Journal of Chemical Physics
SN - 0021-9606
IS - 3
ER -