Absolute densities of N and excited N2 in a N2 plasma

Sumit Agarwal, Bram Hoex, M. C M Van De Sanden, Dimitrios Maroudas, Eray Aydil

Research output: Contribution to journalArticle

Abstract

Today, there is a need to simultaneously characterize the N and N*2 fluxes impinging on the substrate to determine the role of precursors during deposition. An overview is given on the use of modulated-beam light-of-sight threshold ionization mass spectrometry (LOS-TIMS) to measure the absolute densities of N and N*2 in an N2 plasma.

Original languageEnglish (US)
Pages (from-to)4918-4920
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number24
DOIs
StatePublished - Dec 15 2003

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visual perception
light beams
mass spectroscopy
ionization
thresholds

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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Agarwal, S., Hoex, B., Van De Sanden, M. C. M., Maroudas, D., & Aydil, E. (2003). Absolute densities of N and excited N2 in a N2 plasma. Applied Physics Letters, 83(24), 4918-4920. https://doi.org/10.1063/1.1630843

Absolute densities of N and excited N2 in a N2 plasma. / Agarwal, Sumit; Hoex, Bram; Van De Sanden, M. C M; Maroudas, Dimitrios; Aydil, Eray.

In: Applied Physics Letters, Vol. 83, No. 24, 15.12.2003, p. 4918-4920.

Research output: Contribution to journalArticle

Agarwal, S, Hoex, B, Van De Sanden, MCM, Maroudas, D & Aydil, E 2003, 'Absolute densities of N and excited N2 in a N2 plasma', Applied Physics Letters, vol. 83, no. 24, pp. 4918-4920. https://doi.org/10.1063/1.1630843
Agarwal S, Hoex B, Van De Sanden MCM, Maroudas D, Aydil E. Absolute densities of N and excited N2 in a N2 plasma. Applied Physics Letters. 2003 Dec 15;83(24):4918-4920. https://doi.org/10.1063/1.1630843
Agarwal, Sumit ; Hoex, Bram ; Van De Sanden, M. C M ; Maroudas, Dimitrios ; Aydil, Eray. / Absolute densities of N and excited N2 in a N2 plasma. In: Applied Physics Letters. 2003 ; Vol. 83, No. 24. pp. 4918-4920.
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