A hybrid opto-mechanical micro-disk inertia sensor

Ghada Dushaq, Tadesse Mulugeta, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We numerically present optically enabled micro-disk inertia sensor. It consists of a disk-shaped proof mass integrated on top of an optical waveguide. It exhibits a sensitivity of 12dB/μm displacement and a dynamic range of 1g-10g.

Original languageEnglish (US)
Title of host publicationProceedings of Frontiers in Optics 2015, FIO 2015
PublisherOSA - The Optical Society
ISBN (Electronic)9781943580033
StatePublished - Jan 1 2015
EventFrontiers in Optics 2015, FIO 2015 - San Jose, United States
Duration: Oct 18 2015Oct 22 2015

Publication series

NameProceedings of Frontiers in Optics 2015, FIO 2015

Other

OtherFrontiers in Optics 2015, FIO 2015
CountryUnited States
CitySan Jose
Period10/18/1510/22/15

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Dushaq, G., Mulugeta, T., & Rasras, M. (2015). A hybrid opto-mechanical micro-disk inertia sensor. In Proceedings of Frontiers in Optics 2015, FIO 2015 (Proceedings of Frontiers in Optics 2015, FIO 2015). OSA - The Optical Society.